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KCM500
| 파일명 | Download |
|---|
- System Specification
| Description | Specification | |
|---|---|---|
| Application PKG | Size | 250x100mm Magazine |
| Chemical Bath | Liquid | DI Water or Chemical cleaning |
| Temperature | 50°C ± 15°C (can be set) | |
| Rinse Bath | Liquid | DI Water / Max50L |
| Dry Bath | Gas | Air or N2 Gas |
| Temperature | Under 80°C (50°C ~ 70°C) | |
| UPH | Based on 2 M/Z : 2mins (vary on setting parameters) | |
| Foot print | Handler | 2,000(L) x 2,700(W) x 1,950(H)mm |
