File | Download |
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Item | Description |
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Boat Size | 322.6mm x 135.9mm , 322.6mm x 160mm |
Tray Type | JEDEC, EIAJ, TOSHIBA, ELPIDA |
Package Size | Min. 6x6 ~ Max. 15x15 |
Wafer Size | 8 ~ 12 inch |
Conversion Time | 5mins |
Loading | Encoder-typed precision position control |
Height Check | Laser Height Sensor |
MTBA | 1 hr |
1st Pass Yield | 99.98% |
MTBF | 144 hrs |