File | Download |
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Item | Description |
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Material | Sub width max. 95mm, Length max. 240mm, Thickness min. 01.mm Side selecting marking size min : 0.1mm / mark to marks : 0.1mm |
Interlock | Sub mix / Turnover / Sap code, Sub marking / 2D marking / R/F Reading Operator / Maintenance Level |
Lot S/W | Out put Q’ty can be input by the user. (User define setting) Lot Q’ty input Substrates out with requested q’ty Lot End |
SPH | SPH : 500 sub /hr |
Automation | SECS/GEM communication |
SAG | VSP _ over 3KW |
ESD | Grounded: under 10ohm Leak current under 5V Ionizer (Input , Output 2sets) ESD material for product touching area. |
Sub cleaning | Air shower |