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Other Equipment KCM500
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  • System Specification
Description Specification
Application PKG Size 250x100mm Magazine
Chemical Bath Liquid DI Water or Chemical cleaning
Temperature 50°C ± 15°C (can be set)
Rinse Bath Liquid DI Water / Max50L
Dry Bath Gas Air or N2 Gas
Temperature Under 80°C (50°C ~ 70°C)
UPH Based on 2 M/Z : 2mins (vary on setting parameters)
Foot print Handler 2,000(L) x 2,700(W) x 1,950(H)mm
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